Main Research Points
1. The modeling of the nonlinear dynamics, including creep and hysteresis in nano-positioning.
2. Develop robust adaptive control strategies to suppress the adverse effects of multi-axis coupling, nonlinearity and parameter drift.
3. Develop the large-stroke multi-axis macro-micro-saturation motion control to improve the positioning accuracy and speed.
Main Research Progresses
1. Designed a piezoelectric ceramics hysteresis nonlinear output regulation control method based on Bouc-wen model which hops the hysteresis ellipse into a straight line.
2. Developed the quasi-time optimal servo control technology QTOS, which notably improves the positioning accuracy under the premise of ensuring the positioning accuracy.
3. By simulated the human arm structure, developed a two-stage redundant predictive controller, further improved the control accuracy.
Application Prospects
This technology is widely used in the manufacture of micro and nano lithography process of nano-positioning of silicon, electronic assembly of high-precision components positioning, atomic force microscope high-speed scanning and other high-speed and high-precision positioning system.